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Andrew W. Cheung
Andrew W. Cheung
University of Texas at Austin
Oxide
Metallurgy
Capacitor
Dielectric
Dielectric strength
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Properties of Thin Inter-Polysilicon Reoxidized Nitrided Oxides Prepared by Rapid Thermal Processing (RTO/RTN/RTO)
1989
MRS Proceedings
Andrew W. Cheung
G. Q. Lo
D.-L. Kwong
N. S. Alvi
A. Kermani
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