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Nobuaki Tomesakai

Fujitsu

4

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Metalorganic Vapor Phase Epitaxial Growth for High Electron Mobility Transistor LSIs

1992 Japanese Journal of Applied Physics
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Large-area MOVPE growth for HEMT LSI

1991 VLSI-TSA | International Symposium on VLSI Technology, Systems, and Applications
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Recent progress in MOVPE for HEMT LSIs

1990 Journal of Crystal Growth
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Large-Area MOVPE Growth of AlGaAs/GaAs Heterostructures for HEMT LSIs

1990 Japanese Journal of Applied Physics
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