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Carolyn Block
Carolyn Block
Intel
Microstructure
Metallurgy
Copper
Materials science
Semiconductor device fabrication
2
Papers
5
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0
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Engineering gap fill, microstructure and film composition of electroplated copper for on-chip metallization
2001
IITC | International Interconnect Technology Conference
Valery M. Dubin
Christopher D. Thomas
N. Baxter
Carolyn Block
Vinay B. Chikarmane
P. McGregor
David Jentz
Kimin Hong
S. Hearne
C. Zhi
D. Zierath
B. Miner
Markus Kuhn
A Budrevich
Harsono S. Simka
Sadasivan Shankar
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Ultrathin CVD barrier/seed for 0.1 /spl mu/m dual damascene Cu interconnects
2001
IITC | International Interconnect Technology Conference
Carolyn Block
P. McGregor
Markus Kuhn
C. Drosd
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