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Toshio Itoh
Toshio Itoh
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Integration de couches de titane et de nitrure de titane
2003
Toshio Itoh
Michael Xi
Michael X. Yang
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Modele de materiel de type chambre pour le depot de couches atomiques de nitrure de titane
2002
Anh N. Nguyen
Steve H. Chiao
Xiaoxiong Yuan
Lawrence Chung-Lai Lei
Ming Xi
Michael X. Yang
Sean M. Sutter
Toshio Itoh
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Procede de nettoyage d'une chambre de traitement
1999
Brian Boyle
Mei Chang
Toshio Itoh
Ramanujapuram A. Srinivas
Anand Vasudev
Frederick Wu
Li Wu
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