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Xin-Guan Lin
Xin-Guan Lin
Engineering
Dielectric
Silicon oxide
Electronic engineering
Etching
4
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6
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A case study on severe yield loss caused by wafer arcing in BEOL manufacturing
2015
ASMC | Advanced Semiconductor Manufacturing Conference
Hong-Ji Lee
Hsu-Sheng Yu
Shih-Chin Lee
Chih-Kai Yang
Shao-En Chang
Kuo-Feng Lo
Xin-Guan Lin
Nan-Tzu Lian
Tahone Yang
Kuang-Chao Chen
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Wafer topology effect on the etching saturation behaviors in NF 3 /NH 3 remote plasmas
2015
ASMC | Advanced Semiconductor Manufacturing Conference
Kuo-Feng Lo
Fang Hao Hsu
Xin-Guan Lin
Hong-Ji Lee
Nan-Tzu Lian
Tahone Yang
Kuang-Chao Chen
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Uniformity control for high selective down-flow plasma etching on silicon oxide
2014
ASMC | Advanced Semiconductor Manufacturing Conference
Fang Hao Hsu
Kuo-Feng Lo
Xin-Guan Lin
Han-Hui Hsu
Yuan-Chieh Chiu
Hong-Ji Lee
Nan-Tzu Lian
Tahone Yang
Kuang-Chao Chen
Chih-Yuan Lu
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Surface Modification for Controlling the Orientation of Block Copolymers in thin film and in Cylindrical Nanopores
2012
Bulletin of the American Physical Society
Xin-Guan Lin
Feng-Cheng Lin
Shih-Huang Tung
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