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Shao-En Chang
Shao-En Chang
Passivation
Engineering
Dielectric
Electric arc
Tungsten
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A case study on severe yield loss caused by wafer arcing in BEOL manufacturing
2015
ASMC | Advanced Semiconductor Manufacturing Conference
Hong-Ji Lee
Hsu-Sheng Yu
Shih-Chin Lee
Chih-Kai Yang
Shao-En Chang
Kuo-Feng Lo
Xin-Guan Lin
Nan-Tzu Lian
Tahone Yang
Kuang-Chao Chen
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