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Alex Mazurenko
Alex Mazurenko
Philips
Electronic engineering
Metrology
Materials science
Surface acoustic wave
Process control
5
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46
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Surface Wave Metrology for Copper/Low-k Interconnects
2005
Characterization and Metrology for ULSI Technology
Michael Gostein
Alexei Maznev
Alex Mazurenko
Joshua Tower
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Citations (4)
Model‐Based Infrared Metrology for Advanced Technology Nodes and 300 mm Wafer Processing
2005
Characterization and Metrology for ULSI Technology
Peter A. Rosenthal
Carlos Duran
Josh Tower
Alex Mazurenko
Ulrich Mantz
Peter Weidner
Alexander Kasic
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Citations (7)
Comparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric
2005
Thomas Abell
Francesca Iacopi
Greg Prokopowicz
Brad Sun
Alex Mazurenko
Youssef Travaly
Mikhail R. Baklanov
Alain M. Jonas
Chris Sullivan
Sywert Brongersma
Huey-Chiang Liou
Josua Tower
Michael Gostein
Mike Gallagher
Jeff Calvert
Mansour Moinpour
Karen Maex
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Citations (2)
Laser-based surface acoustic wave spectrometer for industrial applications
2003
Review of Scientific Instruments
Alexei Maznev
Alex Mazurenko
Li Zhuoyun
Michael Gostein
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Citations (33)
Applications of laser-generated surface acoustic waves for copper film process monitoring in integrated circuit industry (abstract)
2003
Review of Scientific Instruments
Michael Gostein
A. A. Maznev
Plamen Krastev
Alex Mazurenko
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