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Ronald J. Eakin
Ronald J. Eakin
STMicroelectronics
Optics
Optoelectronics
Photoresist
Photolithography
Optical coating
3
Papers
4
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Process effects resulting from an increased BARC thickness
1997
Ronald J. Eakin
Shangting F. Detweiler
Gregory J. Stagaman
Mark R. Tesauro
A Mark
Ralph R. Dammel
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Effects of complex illumination on lithography performance
1996
Gregory J. Stagaman
Ronald J. Eakin
John C. Sardella
Jeffrey R. Johnson
Charles R. Spinner
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Sub-half-micron i-line photolithography process using AZ BARLi
1995
Jeffrey R. Johnson
Todd Gandy
Gregory J. Stagaman
Ronald J. Eakin
John C. Sardella
Charles R. Spinner
Fu-Tai Liou
A Mark
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Citations (2)
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