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noriaki yagi

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Source de lumière blanche et système de source de lumière blanche

2015
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A refractory metal silicide target, its production method, a refractory metal silicide thin film and semiconductor device

1994
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Ti-w based sputtering target and its production

1992
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High-purity titanium material for a semiconductor element formation, a method of manufacturing a high-purity titanium material, the sputter target and high purity titanium film using the same

1990
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