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Shiau-Yi Ma
Shiau-Yi Ma
Analytical chemistry
Systems design
Lithography
Chemistry
Electron
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Lithography-patterning-fidelity-aware electron-optical system design optimization
2011
Journal of Vacuum Science & Technology B
Sheng-Yung Chen
Hoi-Tou Ng
Shiau-Yi Ma
Hsing-Hong Chen
C. M. Liu
Kuen-Yu Tsai
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