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Yi‐Shiou Huang
Yi‐Shiou Huang
Chemical vapor deposition
Capacitor
Thin film
Dielectric
Inorganic chemistry
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The Effective Dielectric Constant of Silicon Dioxides Deposited in the Spaces Between Adjacent Conductors
1992
Journal of The Electrochemical Society
Geraldine Cogin Schwartz
Yi‐Shiou Huang
William John Patrick
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