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Douglas R. Roberts

Freescale Semiconductor

3

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Reliability Aspects of Integrating High-κ Dielectrics into Back-End-of-Line (BEOL) Process Technology

2006 IIRW | International Integrated Reliability Workshop
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Increasing Microprocessor Speed by Massive Application of On-Die High-K MIM Decoupling Capacitors

2006 ISSCC | International Solid-State Circuits Conference
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Application of on-chip MIM decoupling capacitor for 90nm SOI microprocessor

2005 IEDM | International Electron Devices Meeting
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Citations (17)