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Marc A. Verschuuren

Philips

73

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SCIL nanoimprint: wafer scale overlay alignment and single nm reproductibility by Fourrier scatterometry

2021
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SCIL wafer scale direct nanoimprint for nanophotonic components and fast optical quality inspection with single nm resolution

2021
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Wafer scale direct nanoimprinted high index inorganic (slanted) gratings for AR

2021
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Nanoscale spatial limitations of large-area substrate conformal imprint lithography (SCIL)

2019 Nanotechnology
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Water Recovery X-Ray Rocket grating spectrometer

2019 Journal of Astronomical Telescopes, Instruments, and Systems
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Substrate conformal imprint lithography: functional resists, overlay performance, and volume production

2019
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Collective magnetization dynamics in nano-arrays of thin FePd discs

2019 arXiv: Mesoscale and Nanoscale Physics
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Large area nanoimprint by substrate conformal imprint lithography (SCIL)

2017 Advanced Optical Technologies
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Modified emission of extended light emitting layers by selective coupling to collective lattice resonances

2016 Physical Review B
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SCIL Nanoimprint Solutions; high volume soft NIL for wafer scale sub-10nm resolution

2016
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