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Wen Mao
Wen Mao
Jilin University
Microstructure
Sputter deposition
Sputtering
Materials science
Surface roughness
2
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Influence of sputtering pressure on microstructure and mechanical properties of TiN/SiN x multilayer coatings
2011
An Tao
Wang Li-li
Wen Mao
Zheng Wei-tao
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