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D. Hovorka
D. Hovorka
University of West Bohemia
Sputter deposition
Thin film
Sputtering
Nanocrystalline material
Ion plating
2
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Planar magnetron sputtering discharge enhanced with radio frequency or microwave magnetoactive plasma
1997
Journal of Vacuum Science and Technology
J. Musil
M. Mišina
D. Hovorka
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Citations (17)
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