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Tsuneaki Kamel
Tsuneaki Kamel
Hitachi
Glow discharge
Analytical chemistry
Electromagnet
Sputter deposition
Cathode
1
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10
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2024
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Planar magnetron sputtering cathode with deposition rate distribution controllability
1982
Thin Solid Films
Katsuo Abe
Shigeru Kobayashi
Tsuneaki Kamel
Tamotsu Shimizu
Hideki Tateishi
Susumu Aiuchi
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Citations (10)
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