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J.T.M. van Beek

NXP Semiconductors

25

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A Piezo-resistive, Temperature Compensated, MEMS-Based Frequency Synthesizer

2014
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High precision frequency synthesizer based on MEMS piezoresistive resonator

2013 TRANSDUCERS | International Conference on Solid-State Sensors, Actuators and Microsystems
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A review of MEMS oscillators for frequency reference and timing applications

2012 Journal of Micromechanics and Microengineering
- J.T.M. van Beek
- Robert Puers
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Small, low-ohmic RF MEMS switches with thin-film package

2011 MEMS | International Conference on Micro Electro Mechanical Systems
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Piezoresistive heat engine and refrigerator

2011 Nature Physics
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A SOI Pirani sensor with triple heat sinks

2010 Sensors and Actuators A-physical
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The Effects of Thermal Oxidation of a MEMS Resonator on Temperature Drift and Absolute Frequency

2009 MEMS | International Conference on Micro Electro Mechanical Systems
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56 MHZ piezoresistive micromechanical oscillator

2009 International Conference on Solid-State Sensors, Actuators and Microsystems
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Gas ambient dependence of quality factor in MEMS resonators

2009 SENSORS | IEEE Sensors
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Outgassing of materials used for thin film vacuum packages

2009 ICEPT | International Conference on Electronic Packaging Technology
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Citations (11)