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J.J.M. Bontemps

Eindhoven University of Technology

6

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56 MHZ piezoresistive micromechanical oscillator

2009 International Conference on Solid-State Sensors, Actuators and Microsystems
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A piezo-resistive resonant MEMS amplifier

2008 IEDM | International Electron Devices Meeting
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Scalable 1.1 GHz fundamental mode piezo-resistive silicon MEMS resonator

2007 IEDM | International Electron Devices Meeting
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Scalable 1.1GHzfundamental modepiezo-resistive silicon MEMS resonator

2007 International Electron Devices Meeting
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