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Xin-Peng Geng
Xin-Peng Geng
Xiamen University of Technology
Atomic layer deposition
Materials science
Doping
Analytical chemistry
Annealing (metallurgy)
4
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2
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0
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High doping efficiency Al-doped ZnO films prepared by co-injection spatial atomic layer deposition
2021
Journal of Alloys and Compounds
Chia-Hsun Hsu
Xin-Peng Geng
Pao-Hsun Huang
Wan-Yu Wu
Ming-Jie Zhao
Xiao-Ying Zhang
Qi-Hui Huang
Zhan-Bo Su
Zi-Rong Chen
Shui-Yang Lien
Wen-Zhang Zhu
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Effect of oxygen annealing temperature on properties of spatial atomic layer deposited aluminum-doped zinc oxide films
2021
Materials Science in Semiconductor Processing
Chia-Hsun Hsu
Xin-Peng Geng
Wan-Yu Wu
Ming-Jie Zhao
Pao-Hsun Huang
Xiao-Ying Zhang
Zhan-Bo Su
Zi-Rong Chen
Shui-Yang Lien
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Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers.
2021
Nanomaterials
Xiao-Ying Zhang
Yue Yang
Zhi-Xuan Zhang
Xin-Peng Geng
Chia-Hsun Hsu
Wan-Yu Wu
Shui-Yang Lien
Wen-Zhang Zhu
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Air Annealing Effect on Oxygen Vacancy Defects in Al-doped ZnO Films Grown by High-Speed Atmospheric Atomic Layer Deposition.
2020
Molecules
Chia-Hsun Hsu
Xin-Peng Geng
Wan-Yu Wu
Ming-Jie Zhao
Xiao-Ying Zhang
Pao-Hsun Huang
Shui-Yang Lien
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Citations (2)
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