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Tomoki Yoshitani
Tomoki Yoshitani
Osaka University
Sputtering
Sputter deposition
Pulsed DC
Thin film
Plasma
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Formation of C-Axis-Oriented Aluminum Nitride Thin Films with Plasma Enhanced Reactive Pulsed DC Magnetron Sputtering
2018
The Japan Society of Applied Physics
Kosuke Takenaka
Tomoki Yoshitani
Giichiro Uchida
Yuichi Setsuhara
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