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Edward Kornegay

National Institute of Standards and Technology

6

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21

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Characterization of CCD cameras and optics for dimensional metrology

2001 Characterization and Metrology for ULSI Technology
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Comparison of edge detection methods using a prototype overlay calibration artifact

2001
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Overlay Metrology: Recent Advances and Future Solutions | NIST

2001
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Focus and Edge Detection Algorithms and Their Relevance to the Development of an Optical Overlay Calibration Standard

1999
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Two-dimensional calibration artifact and measurement methodology

1999
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Method to characterize overlay tool misalignments and distortions

1997
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