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Kiyoshi Nakaso
Kiyoshi Nakaso
Toshiba
Proximity effect (audio)
Optical proximity correction
Phase (waves)
Photolithography
Lithography
2
Papers
10
Citations
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Solution for 100nm - EBM-4000
2002
Yoshiaki Hattori
Kiyoshi Hattori
Kenichi Murooka
Takayuki Abe
Satoshi Yasuda
Taiga Uno
Eiji Murakamai
Noriaki Nakayamada
Naoharu Shimomura
Ttsuyoshi Yamashita
Noboru Yamada
Akihiro Sakai
Hirohiko Honda
Toshiaki Shimoyama
Kiyoshi Nakaso
Hideo Inoue
Yoshiaki Onimaru
Keiichi Makiyama
Yoji Ogawa
Tadahiro Takigawa
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Citations (2)
Solution for 100 nm: EBM-4000
2002
Yoshiaki Hattori
Kiyoshi Hattori
Kenichi Murooka
Takayuki Abe
Satoshi Yasuda
Taiga Uno
Eiji Murakami
Noriaki Nakayamada
Naoharu Shimomura
Ttsuyoshi Yamashita
Noboru Yamada
Akihiro Sakai
Hirohiko Honda
Toshiaki Shimoyama
Kiyoshi Nakaso
Hideo Inoue
Yoshiaki Onimaru
Keiichi Makiyama
Yoji Ogawa
Tadahiro Takigawa
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Citations (8)
1