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Terry G. Sparks
Terry G. Sparks
Freescale Semiconductor
Dielectric
Materials science
Electronic engineering
Performance art
Art
3
Papers
41
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Formation de trou d'interconnexion conducteur utilisant la galvanoplastie
2008
Terry G. Sparks
Robert E. Jones
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Three dimensional chip stacking using a wafer-to-wafer integration
2007
IITC | International Interconnect Technology Conference
Ritwik Chatterjee
M. Fayolle
P. Leduc
Scott K. Pozder
B. Jones
Eddie Acosta
Barbara Charlet
T. Enot
M. Heitzmann
M. Zussy
A. Roman
O. Louveau
Sylvain Maitrejean
D. Louis
N. Kernevez
Nicolas Sillon
G. Passemard
V. Po
Varughese Mathew
Sam S. Garcia
Terry G. Sparks
Zhihong Huang
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Citations (34)
Integration of SiCN as a low /spl kappa/ etch stop and Cu passivation in a high performance Cu/low /spl kappa/ interconnect
2002
IITC | International Interconnect Technology Conference
Jeremy I. Martin
Stan Filipiak
Tab Stephens
Fred Huang
Massud Aminpur
Judith Mueller
Ertugrul Demircan
Larry Zhao
Jim Werking
Cindy Goldberg
Steve Park
Terry G. Sparks
Christine Esber
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Citations (7)
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