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Franz J. Comes
Franz J. Comes
Thin film
Amorphous silicon
Impurity
Silylene
Photochemistry
1
Papers
28
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Role of silylene in the deposition of hydrogenated amorphous silicon
1991
The Journal of Physical Chemistry
Thomas R. Dietrich
S. Chiussi
Michael Marek
Angelika Roth
Franz J. Comes
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Citations (28)
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