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Role of silylene in the deposition of hydrogenated amorphous silicon
Role of silylene in the deposition of hydrogenated amorphous silicon
1991
Thomas R. Dietrich
S. Chiussi
Michael Marek
Angelika Roth
Franz J. Comes
Keywords:
Thin film
Amorphous silicon
Impurity
Silylene
Photochemistry
Amorphous carbon
Hydrogen
Chemistry
Silicon
Inorganic chemistry
Deposition (law)
Correction
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