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Fnu Devender
Fnu Devender
Semiconductor
Optoelectronics
Materials science
Electron beam processing
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E-Beam detection of over-etch in semiconductor processing and how over-etch level is related to defect detection parameters
2021
Kwame Owusu-Boahen
Carl Han
Ching Hsueh
Chulwoo Kim
Arun Vijayakumar
Fnu Devender
David Moreau
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