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Carl Han
Carl Han
Samsung
Electron beam processing
Semiconductor
Electronic engineering
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Computer science
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E-Beam detection of over-etch in semiconductor processing and how over-etch level is related to defect detection parameters
2021
Kwame Owusu-Boahen
Carl Han
Ching Hsueh
Chulwoo Kim
Arun Vijayakumar
Fnu Devender
David Moreau
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Using e-Beam inspection and overlay as tool for identifying process weaknesses in semiconductor processing
2020
Kwame Owusu-Boahen
Suraj Patil
Arun Vijayakumar
Alex Pate
Carl Han
Jorg Schwitzgebel
Chulwoo Kim
David J. Moreau
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