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Toshiro Kobayashi
Toshiro Kobayashi
Chemistry
Chemical vapor deposition
Evaporation
Thin film
Carbon film
5
Papers
12
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Effects of deposition conditions on gas-barrier performance of SiOxNy thin films formed via ion-beam-assisted vapor deposition
2006
Journal of Vacuum Science and Technology
Toshiro Kobayashi
Y. Nakano
M. Ogawa
R. Hashimoto
S. Kamikawa
Y. Itoh
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Citations (2)
Reactive vacuum vapor deposition of aluminum oxide thin films by an air-to-air metallizer
2006
Journal of Vacuum Science and Technology
Toshiro Kobayashi
Y. Itoh
Y. Nakano
E. Hirai
R. Hashimoto
S. Kamikawa
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Membrane for the separation of hydrogen, hydrogen separation unit, and method for manufacturing a membrane for separating hydrogen
2003
Hideaki Takatani
Toshiro Kobayashi
Masaki Kawano
Kazuto Kobayashi
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水素分離膜、水素分離ユニット、水素分離膜の製造方法
2002
taka tani hideaki
Masaki Kawano
Kazuto Kobayashi
Toshiro Kobayashi
Hideaki Takatani
kobayasi kazuto
kobayasi tosirou
kouno syou ki
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Element for separating hydrogen
1997
Wakoto Ogawa
Toshiro Kobayashi
Ninoru Sueda
Takahiro Matsumoto
Tetsuya Imai
Shigenori Shirogane
Hiroshi Shiota
Toshiuki Uchida
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