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Yoshihisa Oae
Yoshihisa Oae
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Analytical chemistry
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high resolution
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XY-limiting unit and table device and vacuum table device containing these
2013
Kouji Akashi
Youichi Shimizu
Yoshihisa Oae
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EB resolution capability with CP exposure
2011
Masaki Kurokawa
Hideaki Isobe
Kenji Abe
Yoshihisa Oae
Akio Yamada
Shogo Narukawa
Mikio Ishikawa
Hiroshi Fujita
Morihisa Hoga
Naoya Hayashi
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