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Akira Shimizu
Akira Shimizu
Coating
Materials science
Composite material
gas phase
3
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2024
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シリコン酸化膜形成装置の洗浄方法、シリコン酸化膜の形成方法、及び、シリコン酸化膜形成装置
2014
tyorujun kimu
Cheoljung Kim
ikeuti tosiyuki
Toshiyuki Ikeuchi
tosiyuki ikeuti
simizu akira
Akira Shimizu
akira simizu
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Method and apparatus for gas phase coating
2003
Akira Shimizu
Hideaki Fukuda
Baiei Kawano
Kazuo Sato
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