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Chih-Cheng C. Chin
Chih-Cheng C. Chin
TSMC
Lithography
Resist
Wafer
Materials science
Critical dimension
3
Papers
2
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Global CD uniformity improvement in mask manufacturing for advanced lithography
2003
Shih-Ming Chang
Chih-Cheng C. Chin
Wen-Chuan Wang
Chi-Lun Lu
Ren-Guey Hsieh
Cherng-Shyan Tsay
Yung-Sung Yen
Sheng-Chi Chin
Hsin-Chang Lee
Ru-Gun Liu
Kuei Shun Chen
Hung-Chang Hsieh
Yao-Ching Ku
John Lin
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Mask pattern fidelity quantification
2003
Wen-Chuan Wang
Shih-Ming Chang
Chih-Cheng C. Chin
Chi-Lun Lu
Angus Chin
Hung-Chang Hsieh
Shinn Sheng Yu
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Study of loading effect on dry etching process
2003
Shih-Ming Chang
Chih-Cheng C. Chin
Wen-Chuan Wang
Chi-Lun Lu
Sheng-Chi J. Chin
Hong-Chang Hsieh
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