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Cherng-Shyan Tsay
Cherng-Shyan Tsay
TSMC
Lithography
Phenomenon
Engineering
Resist
Bridging (networking)
3
Papers
6
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OPC modeling by genetic algorithm
2005
W.C. Huang
C. M. Lai
B. Luo
C. K. Tsai
Cherng-Shyan Tsay
C. W. Lai
C.-C. Kuo
R. G. Liu
H. T. Lin
B. J. Lin
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Citations (5)
Phenomena and OPC solution of ripple patterns for 65-nm node
2004
Chih-Ming Lai
Jeng-Shiun Ho
Chien-Wen Lai
Cheng-Kun Tsai
Cherng-Shyan Tsay
Jeng-Horng Chen
Ru-Gun Liu
Yao-Ching Ku
Burn Jeng Lin
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Citations (1)
Global CD uniformity improvement in mask manufacturing for advanced lithography
2003
Shih-Ming Chang
Chih-Cheng C. Chin
Wen-Chuan Wang
Chi-Lun Lu
Ren-Guey Hsieh
Cherng-Shyan Tsay
Yung-Sung Yen
Sheng-Chi Chin
Hsin-Chang Lee
Ru-Gun Liu
Kuei Shun Chen
Hung-Chang Hsieh
Yao-Ching Ku
John Lin
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