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Joe S. Cho
Joe S. Cho
Intel
Focused ion beam
Laser
Laser ablation
Wafer
Resist
1
Papers
5
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Effect of laser mask repair-induced residue and quartz damage in sub-half-micrometer DUV wafer processes
1995
Pei-Yang Yan
Qi-De Qian
Joan McCall
Joseph C. Langston
Yu S. Ger
Joe S. Cho
Robert F. Hainsey
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Citations (5)
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