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Kensuke Shiina
Kensuke Shiina
Photolithography
Extreme ultraviolet lithography
Materials science
Focused ion beam
Optoelectronics
5
Papers
18
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FIB-CVD technology for EUV mask repair
2010
Tsuyoshi Amano
Noriaki Takagi
Hiroyuki Shigemura
Tsuneo Terasawa
Osamu Suga
Kensuke Shiina
Fumio Aramaki
Tomokazu Kozakai
Osamu Matsuda
Anto Yasaka
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FIB mask repair technology for EUV mask
2009
Tsuyoshi Amano
Yasushi Nishiyama
Hiroyuki Shigemura
Tsuneo Terasawa
Osamu Suga
Kensuke Shiina
Fumio Aramaki
Anto Yasaka
Tsukasa Abe
Hiroshi Mohri
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Ga implantation and interlayer mixing during FIB repair of EUV mask defects
2008
Yasushi Nishiyama
Tsuyoshi Amano
Hiroyuki Shigemura
Tsuneo Terasawa
Osamu Suga
Tomokazu Kozakai
Fumio Aramaki
Kensuke Shiina
Anto Yasaka
Ryoji Hagiwara
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Damage analysis of EUV mask under Ga focused ion beam irradiation
2008
Yasushi Nishiyama
Tsuyoshi Amano
Hiroyuki Shigemura
Tsuneo Terasawa
Osamu Suga
Tomokazu Kozakai
Syuichi Kikuchi
Kensuke Shiina
Anto Yasaka
Ryoji Hagiwara
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Evaluation of defect repair of EUVL mask pattern using FIB-GAE method
2008
Tsuyoshi Amano
Yasushi Nishiyama
Hiroyuki Shigemura
Tsuneo Terasawa
Osamu Suga
Ryoji Hagiwara
Kensuke Shiina
Shuichi Kikuchi
Anto Yasaka
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Citations (4)
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