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Haruyuki Nomura

7

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Study on modeling of resist surface charge effect on mask blanks with charge dissipation layer in electron beam mask writers

2021
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Study on physical model of resist surface charge in electron beam mask writer EBM-9500PLUS

2020
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Electron beam lithographic modeling assisted by artificial intelligence technology

2017
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Electron beam mask writer EBM-9500 for logic 7nm node generation

2016
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Study on modeling of resist heating effect correction in EB mask writer EBM-9000

2015
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Citations (2)