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Frauke Rueggeberg
Frauke Rueggeberg
Polishing
Materials science
Extreme ultraviolet lithography
Sputtering
Thermal expansion
2
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5
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Production of low-thermal-expansion EUVL mask blanks with low-defect multilayer, buffer, and absorber
2004
Frank Sobel
Lutz Aschke
Frauke Rueggeberg
Holger Seitz
Nathalie Olschewski
Torsten Reichhardt
Hans Becker
Markus Renno
Steffen Kirchner
Thomas Leutbecher
Guenter Hess
Konrad Knapp
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Effect of electrostatic chucking on EUVL mask flatness
2004
Andrew R. Mikkelson
Roxann L. Engelstad
Edward G. Lovell
Lutz Aschke
Frauke Rueggeberg
Frank Sobel
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Citations (5)
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