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SiYeul Yoon
SiYeul Yoon
KLA-Tencor
Silicon nitride
Scanning electron microscope
Copper
Void (astronomy)
Copper interconnect
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Detecting buried voids in copper interconnect
2013
Hsiang-Chou Liao
Tuung Luoh
Ling-Wu Yang
Tahone Yang
Kuang-Chao Chen
Chih-Yuan Lu
Steve Lin
Alex Cheng
Ivan Yao
SiYeul Yoon
Olivier Moreau
Hong Xiao
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