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David Sporleder
David Sporleder
Nanotechnology
Materials science
Ion source
Dopant
Ionization
2
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Advances in Ion Source Life: The AMAT Trident XP Source
2016
Antonella Cucchetti
Alexander S. Perel
Craig R. Chaney
David Sporleder
Wayne LeBlanc
Morgan McCarty
Bob Lindberg
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UpTime® Si2H6/SiF4 Mix for High Productivity Si Implant
2016
Ashwini K. Sinha
Doug C. Heiderman
Robin Chiu
Bon-Woong Koo
David Sporleder
Stanley M. Smith
Frank Sinclair
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