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S. Le Tacon
S. Le Tacon
University of Nantes
Dielectric
Sputtering
Oxygen
Sputter deposition
Thin film
2
Papers
4
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0
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Improvement of dielectric properties of BLT thin films deposited by magnetron sputtering
2008
Marie-Paule Besland
Caroline Borderon
P.R.J. Barroy
S. Le Tacon
Mireille Richard-Plouet
Dominique Averty
Pierre-Yves Tessier
H.W. Gundel
Luc Brohan
M. A. Djouadi
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Citations (2)
TWO STEP REACTIVE MAGNETRON SPUTTERING OF BLT THIN FILMS
2007
Integrated Ferroelectrics
Marie-Paule Besland
Caroline Borderon
M. Cavellier
S. Le Tacon
Mireille Richard-Plouet
D. Albertini
Dominique Averty
Pierre-Yves Tessier
H.W. Gundel
Luc Brohan
M. A. Djouadi
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Citations (2)
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