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Gronheid
Gronheid
Refractive index
Resist
Node (networking)
Lithography
Optics
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Lithography options for the 32nm half pitch node and beyond
2008
CICC | Custom Integrated Circuits Conference
Ronse
Jansen
Gronheid
Hendrickx
Maenhoudt
Goethals
Vandenberghe
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Citations (5)
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