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Kelly Fishbeck
Kelly Fishbeck
Chemical-mechanical planarization
Materials science
Nanotechnology
Integrated circuit
Dielectric
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Chemical Mechanical Planarization of Cu: Nanoscale Processes
2002
Michael B. Arthur
Kelly Fishbeck
Kara Muessig
J. Andrew McDonald
Christine Williams
Daniel M White
Deborah C. Koeck
Scott S. Perry
Heather Claire Galloway
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Planarization of Low-k Dielectrics
2002
Christine Williams
Michael Arthur
Kelly Fishbeck
Kara Muessig
James McDonald
Daniel White
Deborah C. Koeck
Perry Scott
David Donnelly
Heather C. Galloway
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Chemical Mechanical Planarization of Cu: Nanoscale Processes
2002
Michael Arthur
Kelly Fishbeck
Kara Muessig
James McDonald
Christine Williams
Daniel White
Deborah C. Koeck
Scott S. Perry
Heather C. Galloway
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Modeling Chemical Mechanical Planarization of Copper with an Atomic Force Microscope
2002
Kelly Fishbeck
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