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Boudewijn Sluijk
Boudewijn Sluijk
ASML Holding
Engineering
Overlay
Crosstalk
Systems design
Photolithography
2
Papers
17
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Getting ready for EUV in HVM
2015
Gerald Dicker
Diederik de Bruin
Brennan Peterson
Pieter Wöltgens
Boudewijn Sluijk
Peter Jenkins
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Performance results of a new generation of 300-mm lithography systems
2001
Boudewijn Sluijk
Tom Castenmiller
Richard du Croo de Jongh
Hans Jasper
Theo Modderman
Leon Martin Levasier
Erik Roelof Loopstra
Guustaaf Savenije
Marc Boonman
Harry H. H. M. Cox
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Citations (16)
1