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N Kristensen
N Kristensen
Medicine
Microstructure
Sputtering
Sputter deposition
Thin film
3
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Residual stresses and fracture properties of magnetron sputtered Ti films on Si microelements
1993
Journal of Vacuum Science and Technology
H. Ljungcrantz
Lars Hultman
J.-E. Sundgren
S. Johansson
N Kristensen
Jan-Åke Schweitz
C. J. Shute
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Citations (46)
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