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S. I. Kondratenko
S. I. Kondratenko
Axcelis Technologies
Ion beam
Radiochemistry
Ion implantation
Carbon
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A Study of Carbon Effects in Implantation Process for Non‐Silicide Contact Formation
2006
T. H. Huh
S. Kim
Geum‐Joo Ra
R.N. Reece
S. I. Kondratenko
Y. S. Kim
K. I. Shin
W. H. Jeon
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