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Harry Q. Lee
Harry Q. Lee
Applied Materials
Materials science
Polishing
Composite material
Dielectric
Titan (rocket family)
5
Papers
1
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0
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In Situ Profile Control with Titan Edge TM Heads for Dielectric Planarization of Advanced CMOS Devices
2012
Sivakumar Dhandapani
Jun Qian
Benjamin Cherian
Gregory E. Menk
Charles C. Garretson
Harry Q. Lee
Doyle E. Bennett
Thomas H. Osterheld
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Détermination des propriétés physiques d'un substrat
2007
Abraham Ravid
Boguslaw A. Swedek
Jeffrey Drue David
Jun Qian
Ingemar Carlsson
Dominic J. Benvegnu
Harry Q. Lee
Lakshmanan Karuppiah
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Method and apparatus for polishing substrates
1996
Ilya Perlov
Eugene Gantvarg
Harry Q. Lee
Robert D. Tolles
Norm Shendon
Sasson Somekh
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Method and device for polishing substrates
1996
Ilya Perlov
Eugene Gantvarg
Harry Q. Lee
Robert D. Tolles
Norm Shendon
Sasson Somekh
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Procédé et dispositif pour polir des substrats
1996
Ilya Perlov
Eugene Gantvarg
Harry Q. Lee
Robert D. Tolles
Norm Shendon
Sasson Somekh
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