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C.Y. Cheng
C.Y. Cheng
Industrial Technology Research Institute
Materials science
Analytical chemistry
Optics
X-ray lithography
Electron-beam lithography
3
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46
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E-beam direct-write lithography for the 45nm node using the novel STEAG HamaTech single substrate coat-bake-develop ModuTrack
2005
Lothar Berger
W. Dieckmann
C. Krauss
Peter Dress
J. Waldorf
C.Y. Cheng
S. L. Wei
W. S. Chen
M. J. Kao
M. J. Tsai
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Citations (1)
An oxidation enhanced mechanical polishing technique for CVD diamond films
2005
Diamond and Related Materials
C.Y. Cheng
Hung-Yin Tsai
C H Wu
P.Y. Liu
C.H. Hsieh
Y.Y. Chang
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Citations (35)
1