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teppei adati
teppei adati
Polymer
Polymer chemistry
Resist
Materials science
Chemistry
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Monomeric, polymeric compounds, the resist material, and a pattern forming method
2016
seigi tei hasi
Masayoshi Sagehashi
masahiro fukusima
Masahiro Fukushima
hasegawa kouzi
Koji Hasegawa
kouzi hasegawa
teppei adati
Teppei Adachi
kazuhiro katayama
Kazuhiro Katayama
hatakeyama jun
Jun Hatakeyama
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Sulfonium salt and a polymer compound, a resist composition, and patterning process, and manufacturing method of the polymer compound
2012
oohasi masaki
masaki oohasi
hatakeyama jun
teppei adati
masahiro fukusima
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ムスコン合成前駆体E-3-methylcyclopentadecan-2-enoneの効率的な合成法
2010
masaharu douya
teppei adati
kyuudai hagiwara
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