author-photo

S. Del Medico

STMicroelectronics

4

Papers

44

Citations

Citation Trend

Filter By

Papers (4) Sort By

Journal Conference Others

Gate shadowing effect on Ni(Pt)Si abnormal diffusion for sub-45nm technologies

2011 Microelectronic Engineering
Show All
- Source
- Cite
- Save
Citations (4)
Nickel silicide encroachment formation and characterization

2010 Microelectronic Engineering
Show All
- Source
- Cite
- Save
Citations (31)
Nitrogen impurity effects on nickel silicide formation at low temperatures - New nitrogen co-plasma approach

2008 Microelectronic Engineering
Show All
- Source
- Cite
- Save
Citations (6)
Advanced patterning studies using shaped e-beam lithography for 65-nm CMOS preproduction

2003
Show All
- Source
- Cite
- Save
Citations (3)