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Robert J. Virgalla
Robert J. Virgalla
Metrology
Scanning electron microscope
Photolithography
Architecture
Focused ion beam
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DualBeam metrology: a new technique for optimizing 0.13-um photo processes
2001
Steven D. Berger
Denis Desloge
Robert J. Virgalla
Todd Davis
Ted A. Paxton
David Witko
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