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Stephan Back
Stephan Back
Substrate (chemistry)
Optics
Extreme ultraviolet lithography
Materials science
3
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Lightweight mirrors and projection exposure system with such a mirror
2014
Rolf Freimann
Stephan Back
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Dispositif d’imagerie dans une machine d’exposition par projection
2006
Stephan Back
Wolfgang Hummel
Juergen Fischer
Karl-Eugen Aubele
Erich Merz
Raoul Reiner
Klaus Rief
Stefan Schoengart
Markus Neumaier
Baerbel Schwaer
Ulrich Weber
Michael Muehlbeyer
Hubert Holderer
Alexander Kohl
Jochen Weber
Johannes Lippert
Thorsten Rassel
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Element de surveillance destine a des systemes de projection lithographiques
2005
Stephan Back
Joachim Buechele
Guido Soyez
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